发明公开
- 专利标题: DISPOSITIF POUR LA SYNTHESE DE NANOPARTICULES PAR DEPOT CHIMIQUE EN PHASE VAPEUR EN LIT FLUIDISE
- 专利标题(英): Device for the synthesis of nanoparticles by fluidized-bed chemical vapour deposition
- 专利标题(中): DEVICE纳米粒子通过流化床CVD合成
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申请号: EP09740169.9申请日: 2009-09-10
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公开(公告)号: EP2350341A1公开(公告)日: 2011-08-03
- 发明人: FILHOL, Lionel , THOLLON, Stéphanie , DONNET ,Sébastien
- 申请人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 代理机构: Reboussin, Yohann Mickaël Noël
- 优先权: FR0805584 20081009
- 国际公布: WO2010040908 20100415
- 主分类号: C23C16/442
- IPC分类号: C23C16/442 ; B01J37/02 ; C23C16/455
摘要:
The present invention proposes a device for the vapour-phase deposition of chemical species onto support grains of spherical or similar shapes placed in a fluidized bed, comprising: • a first fluidized-bed chamber (1), housed in which is a fluidization component (8), formed into a funnel, to receive support grains (2) of spherical or similar shapes, • a second chamber (3) in fluid connection with the first chamber (1), intended both to provide precursors, in vapour phase, of the chemical species to be deposited on the support grains (2) and to transport a fluidizing gas in the direction of the first chamber (1), • a flute (9), positioned at the inlet of the fluidization component (8), in order to control the distribution of the vapour-phase precursors and of the fluidizing gas within the fluidization component (8), characterized in that the distribution flute (9) comprises one or more external grooves or recesses (92), the or each groove (92) comprising a first portion oriented along the longitudinal axis of the flute (9) and a second portion that winds helically around this axis in order to generate a fluidizing gas vortex within the first chamber (1).
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