发明公开
- 专利标题: Apparatus for transmission of energy and/or for transportation of an ion as well as a particle beam device having an apparatus such as this
- 专利标题(中): 装置用于离子粒子束的能量和/或运输的传输,并用这样的装置
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申请号: EP11152420.3申请日: 2011-01-27
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公开(公告)号: EP2355128A2公开(公告)日: 2011-08-10
- 发明人: Glasmachers, Albrecht, Prof. Dr. , Laue, Alexander , Aliman, Michel, Dr. , Mantz, Hubert, Dr. , Zeile, Ulrike, Dr. , Dömer, Holger, Dr.
- 申请人: Carl Zeiss NTS GmbH
- 申请人地址: Carl-Zeiss-Strasse 56 73447 Oberkochen DE
- 专利权人: Carl Zeiss NTS GmbH
- 当前专利权人: Carl Zeiss NTS GmbH
- 当前专利权人地址: Carl-Zeiss-Strasse 56 73447 Oberkochen DE
- 代理机构: Tongbhoyai, Martin
- 优先权: DE102010001347 20100128
- 主分类号: H01J49/06
- IPC分类号: H01J49/06 ; H01J37/244 ; H01J37/256
摘要:
The invention relates to an apparatus (1200,1300) for transmission of energy of an ion to at least one gas particle and/or for transportation of an ion. The invention also relates to a particle beam device having an apparatus such as this. In particular, a container is provided, in which a gas is arranged which has gas particles, wherein the container has a transport axis. Furthermore, at least one first multipole unit and at least one second multipole unit are provided, which are arranged along the transport axis. The first multipole unit and the second multipole unit are formed by printed circuit boards. Furthermore, an electronic circuit is provided, which provides each multipole unit with a potential, such that a potential gradient is generated, in particular along the transport axis.
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