Disclosed is a composition comprising: an aqueous dispersion of fluoroalkylsilyl surface modified nanoparticles, wherein the nanoparticles comprise at least one member selected from the group consisting of silica, titania, zirconia, layered magnesium silicate, aluminosilicate, natural clay, synthetic clay and mixtures thereof, and wherein the fluoroalkylsilyl is: (F(CF2)nCH2CH2)mSi(O—)p, where n is 2, 3 or 4, p is 1, 2 or 3, and m is (4−p). Also disclosed are processes of making an aqueous dispersion of fluoroalkylsilyl surface modified nanoparticles, and treating a substrate with an aqueous dispersion of fluoroalkylsilyl surface modified nanoparticles. Articles and substrates comprising the fluoroalkylsilyl surface modified nanoparticles are also disclosed.