发明公开
EP2392528A1 POSITION CONTROLLER FOR FLEXIBLE SUBSTRATE
审中-公开
POSITIONSSTEUERUNGFÜREIN FLEXIBLES SUBSTRAT
- 专利标题: POSITION CONTROLLER FOR FLEXIBLE SUBSTRATE
- 专利标题(中): POSITIONSSTEUERUNGFÜREIN FLEXIBLES SUBSTRAT
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申请号: EP10735688.3申请日: 2010-01-08
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公开(公告)号: EP2392528A1公开(公告)日: 2011-12-07
- 发明人: YOKOYAMA, Shoji , YAMADA, Takanori , WADA, Takenori
- 申请人: Fuji Electric Co., Ltd.
- 申请人地址: 1-1, Tanabeshinden, Kawasaki-ku Kawasaki-shi 210-9530 JP
- 专利权人: Fuji Electric Co., Ltd.
- 当前专利权人: Fuji Electric Co., Ltd.
- 当前专利权人地址: 1-1, Tanabeshinden, Kawasaki-ku Kawasaki-shi 210-9530 JP
- 代理机构: MERH-IP Matias Erny Reichl Hoffmann
- 优先权: JP2009016440 20090128
- 国际公布: WO2010087218 20100805
- 主分类号: B65H23/025
- IPC分类号: B65H23/025 ; B65H23/038 ; H01L21/205 ; H01L31/04
摘要:
A flexible substrate position control device (100) in a processing device, which transports a band-shaped flexible substrate (1) in a horizontal direction and in a vertical orientation and carries out processing of the substrate by processing units installed in a transport path of the substrate, is provided with: a pair of clamping rollers (131,132) that clamp an upper edge of the substrate; a support mechanism (140) that rotatably supports the pair of clamping rollers while allowing these rollers to mutually contact and separate from each other; urging means (150) for applying pressing force to the pair of clamping rollers through the support mechanism; and adjusting means (160) for adjusting the pressing force applied by the urging means. The pair of clamping rollers has an inclination, in which the direction of pressing relative to the clamping surface of the substrate is towards the edge of the substrate in the width direction, and is supported such that the rotating direction at the clamping surface is the same direction as the transport direction of the substrate. This flexible substrate position control device is able to inhibit the occurrence of sagging and wrinkling of a band-shaped flexible substrate, and together with realizing high-quality processing, is able to deal with transporting a flexible substrate in an opposite direction.
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