发明授权
EP2435789B1 MEMS MASS SPRING DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME
有权
微机电系统 - 麦克风 - 美国麻醉师联合会
- 专利标题： MEMS MASS SPRING DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME
- 专利标题（中）： 微机电系统 - 麦克风 - 美国麻醉师联合会
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申请号： EP10732533.4申请日： 2010-05-27
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公开(公告)号： EP2435789B1公开(公告)日： 2015-04-08
- 发明人: AZIZ, Ahmed Kamal Said Abdel , SHARAF, Abdel Hamid , SHERRY, Mohamed , SEDKY, Sherif
- 申请人： King Abdullah University Of Science And Technology
- 申请人地址： P.O. Box 55455 Jeddah 21534 SA
- 专利权人： King Abdullah University Of Science And Technology
- 当前专利权人： King Abdullah University Of Science And Technology
- 当前专利权人地址： P.O. Box 55455 Jeddah 21534 SA
- 代理机构： Potter Clarkson LLP
- 优先权： US181565P 20090527
- 国际公布： WO2010138717 20101202
- 主分类号： G01C19/5719
- IPC分类号： G01C19/5719 ; G01P15/08 ; G01P15/18 ; G01P15/125 ; B81B3/00
摘要：
MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
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