发明公开
EP2445009A2 Photoelectric conversion device and image pickup system with photoelectric conversion device
审中-公开
Photoelektrische Umwandlungsvorrichtung und Bildaufnahmesystem mit der photoelektrischen Umwandlungsvorrichtung
- 专利标题： Photoelectric conversion device and image pickup system with photoelectric conversion device
- 专利标题（中）： Photoelektrische Umwandlungsvorrichtung und Bildaufnahmesystem mit der photoelektrischen Umwandlungsvorrichtung
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申请号： EP11195883.1申请日： 2007-07-04
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公开(公告)号： EP2445009A2公开(公告)日： 2012-04-25
- 发明人: Ura, Ken-ichiro , Fukumoto, Yoshihiko , Kataoka, Yuzo
- 申请人： Canon Kabushiki Kaisha
- 申请人地址： 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 代理机构： TBK
- 优先权： JP2006189244 20060710
- 主分类号： H01L27/146
- IPC分类号： H01L27/146
摘要：
A manufacturing method of a solid-state imaging apparatus, wherein the solid-state imaging apparatus comprises a photoelectric conversion element, a transfer gate electrode, a second semiconductor region, an element isolation region, and a wiring, arranged on the element isolation region, wherein the manufacturing method comprises a step of forming the second semiconductor region, by injecting an impurity ion, through a mask covering the wiring and the element isolation region and extending from the element isolation region to a part of an activation region, into a portion of the activation region not covered with the mask.
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