发明公开
EP2466662A1 MAGNETOSTRICTIVE FILM, MAGNETOSTRICTIVE ELEMENT, TORQUE SENSOR, FORCE SENSOR, PRESSURE SENSOR, AND PROCESS FOR PRODUCTION OF MAGNETOSTRICTIVE FILM
有权
磁致伸缩膜，磁致伸缩元件力矩传感器，力传感器，压力传感器和其制造方法磁致伸缩膜
- 专利标题： MAGNETOSTRICTIVE FILM, MAGNETOSTRICTIVE ELEMENT, TORQUE SENSOR, FORCE SENSOR, PRESSURE SENSOR, AND PROCESS FOR PRODUCTION OF MAGNETOSTRICTIVE FILM
- 专利标题（中）： 磁致伸缩膜，磁致伸缩元件力矩传感器，力传感器，压力传感器和其制造方法磁致伸缩膜
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申请号： EP10806398.3申请日： 2010-07-30
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公开(公告)号： EP2466662A1公开(公告)日： 2012-06-20
- 发明人: INOUE Akihisa , MOTOE Yoshitsugu , NAKASHIMA Koji , ISHIKAWA Tomohito , SUGIYAMA Masaharu , IGARASHI Takanori , WAKIWAKA Hiroyuki , MAKINO Akihiro
- 申请人： Topy Kogyo Kabushiki Kaisha , Shinshu University , Tohoku University
- 申请人地址： 2-2, Osaki 1-chome Shinagawa-ku Tokyo 141-8634 JP
- 专利权人： Topy Kogyo Kabushiki Kaisha,Shinshu University,Tohoku University
- 当前专利权人： Topy Kogyo Kabushiki Kaisha,Shinshu University,Tohoku University
- 当前专利权人地址： 2-2, Osaki 1-chome Shinagawa-ku Tokyo 141-8634 JP
- 代理机构： Lippert, Stachow & Partner
- 优先权： JP2009180848 20090803
- 国际公布： WO2011016399 20110210
- 主分类号： H01L41/12
- IPC分类号： H01L41/12 ; C22C45/02 ; C23C4/06 ; C23C4/12 ; G01L1/12 ; G01L3/10 ; G01L9/16 ; H01F10/13 ; H01L29/84
摘要：
For providing a magnetostrictive film that can exhibit high magnetostrictive properties in the vicinity of zero magnetic field and their manufacturing methods, a magnetostrictive film thermal sprayed on an object under test includes a metallic glass film subjected to thermal processing at a temperature lower than the glass transition temperature and not lower than the Curie point, and shows a linearity between the magnetic field and the magnetostriction in at least a part of the magnetic field from -15 kA/m to +15 kA/m (both inclusive).
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