发明公开
- 专利标题: PROCÈDE DE FABRICATION D'UN DISPOSITIF D'ÉMISSION DE LUMIÈRE A BASE DE DIODES ELECTROLUMINESCENTES
- 专利标题(英): Method for manufacturing a light-emitting diode device for emitting light
- 专利标题(中): 一种用于生产设备用于LED发光
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申请号: EP10752079.3申请日: 2010-07-22
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公开(公告)号: EP2467871A1公开(公告)日: 2012-06-27
- 发明人: GASSE, Adrien , GILET, Philippe
- 申请人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 代理机构: Vuillermoz, Bruno
- 优先权: FR0955697 20090818
- 国际公布: WO2011020959 20110224
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L27/15 ; H01L33/06 ; H01L33/64
摘要:
The invention relates to the manufacture of an LED device, including: growing nanowire semiconductors (16) on a first electrode (14) produced on an insulating surface (10, 12), and encapsulating the latter in the planarization layer (18); forming, on the planarization layer (18), a second electrode (20) having contact take-up areas (22); forming LEDs (24) by: releasing a band of the first electrode around each take-up area (22), comprising: forming a mask for defining said bands on the second electrode (20); chemically etching the planarization layer, said etching being abutted so as to preserve the planarization layer; chemically etching the thus-released portion of the nanowires; and chemically etching the remaining planarization layer; and forming a trench (28) along each of said bands up to the insulating surface (10, 12); and placing the LEDs (24) in series by connecting the take-up areas (22) and the bands of the first electrode.
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