发明公开
EP2467906A2 ANGULAR BEAM ADJUSTMENT SYSTEMS AND METHODS FOR LASER SYSTEMS 有权
角梁调节系统和激光系统的方法

  • 专利标题: ANGULAR BEAM ADJUSTMENT SYSTEMS AND METHODS FOR LASER SYSTEMS
  • 专利标题(中): 角梁调节系统和激光系统的方法
  • 申请号: EP10810596.6
    申请日: 2010-08-19
  • 公开(公告)号: EP2467906A2
    公开(公告)日: 2012-06-27
  • 发明人: BOGGY, Richard
  • 申请人: Newport Corporation
  • 申请人地址: 1791 Deere Avenue Irvine, CA 92606 US
  • 专利权人: Newport Corporation
  • 当前专利权人: Newport Corporation
  • 当前专利权人地址: 1791 Deere Avenue Irvine, CA 92606 US
  • 代理机构: Schwabe - Sandmair - Marx
  • 优先权: US235671P 20090820
  • 国际公布: WO2011022547 20110224
  • 主分类号: H01S3/10
  • IPC分类号: H01S3/10 H01S3/105 H01S3/101
ANGULAR BEAM ADJUSTMENT SYSTEMS AND METHODS FOR LASER SYSTEMS
摘要:
Embodiments are directed to methods for correcting lateral and angular displacement of laser beams within a laser cavity. For some embodiments, such methods are used to correct angular displacement of laser beams within a laser cavity that result from varying the lasing wavelength in a tunable laser system.
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