发明公开
- 专利标题： A MICROMECHANICAL RESONATOR
- 专利标题（中）： 激光共振器
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申请号： EP10821619.3申请日： 2010-09-27
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公开(公告)号： EP2484008A1公开(公告)日： 2012-08-08
- 发明人: OJA, Aarne , PENSALA, Tuomas , MELTAUS, Johanna
- 申请人： Teknologian tutkimuskeskus VTT
- 申请人地址： Vuorimiehentie 3 02150 Espoo FI
- 专利权人： Teknologian tutkimuskeskus VTT
- 当前专利权人： Teknologian tutkimuskeskus VTT
- 当前专利权人地址： Vuorimiehentie 3 02150 Espoo FI
- 代理机构： Lipsanen, Jari Seppo Einari
- 优先权： FI20095988 20090928
- 国际公布： WO2011042597 20110414
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H03H3/007 ; H03H3/013 ; B81B7/00 ; B81B3/00
摘要：
The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f
o , coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).
o , coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).
公开/授权文献
- EP2484008B1 A MICROMECHANICAL RESONATOR 公开/授权日：2016-08-10
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