发明公开
- 专利标题: Alpha-particle emitter removal
- 专利标题(中): α粒子发射器的距离
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申请号: EP12168789.1申请日: 2012-05-22
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公开(公告)号: EP2528063A3公开(公告)日: 2016-06-15
- 发明人: Granbois, Matthew L. , Goltz, Harlan Robert , Calvert, Jeffrey M. , Rodgers, Matthew Lawrence , Marston, Charles R.
- 申请人: Rohm and Haas Electronic Materials LLC , Dow Global Technologies LLC
- 申请人地址: 455 Forest Street Marlborough, MA 01752 US
- 专利权人: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- 当前专利权人: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- 当前专利权人地址: 455 Forest Street Marlborough, MA 01752 US
- 代理机构: Houghton, Mark Phillip
- 优先权: US201161489251P 20110524
- 主分类号: G21F9/00
- IPC分类号: G21F9/00 ; G21F9/04 ; B23K35/00 ; C22B3/42 ; G21F9/12 ; H01L23/556 ; H01L23/00
摘要:
Methods of purifying acidic metal solutions by removing at least a portion of alpha-particle emitting materials are provided. The purified metal solutions are useful in a variety of applications requiring low levels of alpha-particle emission.
公开/授权文献
- EP2528063B1 Alpha-particle emitter removal 公开/授权日:2018-01-03
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