发明公开
EP2528171A1 Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide
审中-公开
Wellenleiter,Vorrichtung mit dem Wellenleiter,und Herstellungsverfahrenfürden Wellenleiter
- 专利标题: Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide
- 专利标题(中): Wellenleiter,Vorrichtung mit dem Wellenleiter,und Herstellungsverfahrenfürden Wellenleiter
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申请号: EP12003433.5申请日: 2012-05-04
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公开(公告)号: EP2528171A1公开(公告)日: 2012-11-28
- 发明人: Koyama, Yasushi
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo JP
- 代理机构: Weser, Thilo
- 优先权: JP2011110887 20110517
- 主分类号: H01S1/02
- IPC分类号: H01S1/02 ; H01S5/12 ; H01S5/227 ; H01S5/34 ; H01S5/10 ; H01S5/32
摘要:
Provided are a waveguide with which strain and defect caused by a manufacturing process or the like or caused in a semiconductor in an initial stage or during operation are suppressed so that improvement and stabilization of characteristics are expected, and a method of manufacturing the waveguide. A waveguide (107) includes a first conductor layer (103) and a second conductor layer (104) that are composed of a negative dielectric constant medium having a negative real part of dielectric constant with respect to an electromagnetic wave in a waveguide mode, and a core layer (108) that is in contact with and placed between the first conductor layer and the second conductor layer, and includes a semiconductor portion (101). The core layer including the semiconductor portion has a particular depressed and projected structure extending in an in-plane direction.
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