- 专利标题: TRANSFER SYSTEM AND TRANSFER METHOD
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申请号: EP11747444申请日: 2011-02-24
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公开(公告)号: EP2540474A4公开(公告)日: 2017-11-15
- 发明人: ITANI SHINYA , NISHIHARA HIROMI , BABA TAKATO , TASHIRO TAKAHARU , OOKAWA TAKAFUMI , KITAHARA HIDETOSHI
- 申请人: TOSHIBA MACHINE CO LTD
- 专利权人: TOSHIBA MACHINE CO LTD
- 当前专利权人: TOSHIBA MACHINE CO LTD
- 优先权: JP2010042398 2010-02-26
- 主分类号: B29C59/02
- IPC分类号: B29C59/02 ; B29C33/34 ; B29C33/38 ; B29C33/44 ; H01L21/027
摘要:
A transfer system 1 comprising: a conveying/positioning device 3 configured to convey and position a flat sheet-shaped mold MA in a predetermined direction, on which a fine transfer pattern M1 is formed; a transfer device 5 configured to transfer the fine transfer pattern M1 to a molding target W, the transfer device 5 being provided on an upstream side in the conveying direction of the sheet-shaped mold MA; and a peeling device 7 configured to peel off the sheet-shaped mold MA and the molding target from those mutually clinging to each other, after the transfer by the transfer device 5 is performed and the conveyance by the conveying/positioning device 3 is performed, the peeling device 7 being provided on a downstream side in the conveying direction of the sheet-shaped mold MA.
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