- 专利标题： APPARATUS FOR DETECTING POSITION OF SHEET-LIKE MOLD, TRANSFER APPARATUS AND TRANSFER METHOD
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申请号： EP11753206申请日： 2011-02-24
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公开(公告)号： EP2546048A4公开(公告)日： 2017-11-01
- 发明人: ITANI SHINYA , NISHIHARA HIROMI , BABA TAKATO , TASHIRO TAKAHARU , OOKAWA TAKAFUMI , KITAHARA HIDETOSHI
- 申请人： TOSHIBA MACHINE CO LTD
- 专利权人： TOSHIBA MACHINE CO LTD
- 当前专利权人： TOSHIBA MACHINE CO LTD
- 优先权： JP2010050452 2010-03-08
- 主分类号： B29C59/02
- IPC分类号： B29C59/02 ; B29C33/30 ; B29C33/40 ; H01L21/027
摘要：
A sheet-shaped mold position detection device 183 for conveying and positioning a sheet-shaped mold M on which a fine transfer pattern M1 is formed. The sheet-shaped mold position detection device 183 includes a sheet-shaped mold position detector 191 that detects a predetermined region of the sheet-shaped mold M by detecting transmittance of light in the sheet-shaped mold M.
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