发明公开
EP2555058A2 Environmental Control Subsystem for a Variable Data Lithographic Apparatus
有权
Klimaregelungsanlagefüreine Lithographievorrichtung mit variablen Daten
- 专利标题: Environmental Control Subsystem for a Variable Data Lithographic Apparatus
- 专利标题(中): Klimaregelungsanlagefüreine Lithographievorrichtung mit variablen Daten
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申请号: EP12178613.1申请日: 2012-07-31
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公开(公告)号: EP2555058A2公开(公告)日: 2013-02-06
- 发明人: Pattekar, Ashish , Stowe, Timothy D , Biegelsen, David K , Odell, Peter G.
- 申请人: Xerox Corporation , Palo Alto Research Center Incorporated
- 申请人地址: Patent Department, Xerox Square - 20 A, 100 Clinton Avenue South Rochester, New York 14644 US
- 专利权人: Xerox Corporation,Palo Alto Research Center Incorporated
- 当前专利权人: Xerox Corporation,Palo Alto Research Center Incorporated
- 当前专利权人地址: Patent Department, Xerox Square - 20 A, 100 Clinton Avenue South Rochester, New York 14644 US
- 代理机构: Skone James, Robert Edmund
- 优先权: US201113204560 20110805
- 主分类号: G03G15/10
- IPC分类号: G03G15/10 ; G03G15/22
摘要:
Methods and structures are disclosed to minimize the presence of vapor clouding in the path between an energy (e.g., radiation) source (16) and the dampening fluid layer in a variable data lithography system. Also disclosed are conditions for optimizing vaporization of regions of the dampening fluid layer for a given laser source power. Conditions are also disclosed for minimizing recondensation of vaporized dampening fluid onto the patterned dampening fluid layer. Accordingly, a reduction in the power required for, and an increase in the reproducibility of, patterning of a dampening fluid layer over a reimageable surface (12) in a variable data lithography system are disclosed.
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