发明公开
EP2555058A2 Environmental Control Subsystem for a Variable Data Lithographic Apparatus 有权
Klimaregelungsanlagefüreine Lithographievorrichtung mit variablen Daten

Environmental Control Subsystem for a Variable Data Lithographic Apparatus
摘要:
Methods and structures are disclosed to minimize the presence of vapor clouding in the path between an energy (e.g., radiation) source (16) and the dampening fluid layer in a variable data lithography system. Also disclosed are conditions for optimizing vaporization of regions of the dampening fluid layer for a given laser source power. Conditions are also disclosed for minimizing recondensation of vaporized dampening fluid onto the patterned dampening fluid layer. Accordingly, a reduction in the power required for, and an increase in the reproducibility of, patterning of a dampening fluid layer over a reimageable surface (12) in a variable data lithography system are disclosed.
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