发明公开
- 专利标题: System and method for direct imaging
- 专利标题(中): 方法和系统直接成像
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申请号: EP12179630.4申请日: 2012-08-08
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公开(公告)号: EP2560362A3公开(公告)日: 2013-08-28
- 发明人: Heinemann, Stefan , Retschke, Wolfgang , Wagner, Holger , Burghoff, Jonas , Gross, Abraham
- 申请人: ORBOTECH LTD. , Laser Imaging Systems GmbH & Co. KG.
- 申请人地址: P.O. Box 215 Yavne 81102 IL
- 专利权人: ORBOTECH LTD.,Laser Imaging Systems GmbH & Co. KG.
- 当前专利权人: ORBOTECH LTD.,Laser Imaging Systems GmbH & Co. KG.
- 当前专利权人地址: P.O. Box 215 Yavne 81102 IL
- 代理机构: White, Duncan Rohan
- 优先权: US201113213360 20110819
- 主分类号: H04N1/04
- IPC分类号: H04N1/04
摘要:
A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources (50) configured to emit a plurality of beams (65), an optical system (60) for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator (70) positioned to receive the plurality of beams (65) aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams (65) as an acoustic wave propagates in an acoustic direction, and a scanning element (80) adapted to scan an exposure plane with the plurality of beams (65) modulated by the acoustic optical modulator (70) at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams (65) into a single exposure spot.
公开/授权文献
- EP2560362B1 System and method for direct imaging 公开/授权日:2017-05-17
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