发明公开
EP2566650A4 INDUCTIVE DEVICES AND LOW FLOW PLASMAS USING THEM 审中-公开
电感器件低流量PLASMATA SO

INDUCTIVE DEVICES AND LOW FLOW PLASMAS USING THEM
摘要:
Certain embodiments described herein are directed to devices that can be used to sustain a low flow plasma. In certain examples, the low flow plasma can be sustained in a torch comprising an outer tube and an auxiliary tube within the outer tube. In some examples, the auxiliary tube comprises an effective length to match the shape of a low flow plasma sustained in the torch using a flat plate electrode. Methods and systems using the torches are also described.
信息查询
0/0