发明公开
- 专利标题: INDUCTIVE DEVICES AND LOW FLOW PLASMAS USING THEM
- 专利标题(中): 电感器件低流量PLASMATA SO
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申请号: EP11778229申请日: 2011-05-04
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公开(公告)号: EP2566650A4公开(公告)日: 2014-12-03
- 发明人: MORRISROE PETER J
- 申请人: PERKINELMER HEALTH SCI INC
- 专利权人: PERKINELMER HEALTH SCI INC
- 当前专利权人: PERKINELMER HEALTH SCI INC
- 优先权: US33161010 2010-05-05
- 主分类号: B23K10/00
- IPC分类号: B23K10/00 ; H05H1/30
摘要:
Certain embodiments described herein are directed to devices that can be used to sustain a low flow plasma. In certain examples, the low flow plasma can be sustained in a torch comprising an outer tube and an auxiliary tube within the outer tube. In some examples, the auxiliary tube comprises an effective length to match the shape of a low flow plasma sustained in the torch using a flat plate electrode. Methods and systems using the torches are also described.
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