发明授权
- 专利标题: VACUUM PUMP
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申请号: EP11800553.7申请日: 2011-05-20
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公开(公告)号: EP2589814B1公开(公告)日: 2018-12-26
- 发明人: KABASAWA, Takashi
- 申请人: Edwards Japan Limited
- 申请人地址: 1078-1 Yoshihashi Yachiyo-shi, Chiba 276-8523 JP
- 专利权人: Edwards Japan Limited
- 当前专利权人: Edwards Japan Limited
- 当前专利权人地址: 1078-1 Yoshihashi Yachiyo-shi, Chiba 276-8523 JP
- 代理机构: Norton, Ian Andrew
- 优先权: JP2010151981 20100702
- 国际公布: WO2012002084 20120105
- 主分类号: F04D29/64
- IPC分类号: F04D29/64 ; F04D19/04
摘要:
Disclosed is a low-cost composite-type vacuum pump having a strength capable of withstanding high loads and using a cylindrical rotor formed from a fiber-reinforced plastic material. Having a turbo-molecular pump section (14) and a thread groove pump section (15), the composite vacuum pump is formed by press-fitting a joint portion (20a) of a rotor (17) of the turbo-molecular pump section (14) into the upper end section of a cylindrical rotor (21) formed from the fiber-reinforced plastic material of the thread groove pump section (15). The joint portion (20a) of the rotor (17) is formed on the lower end side of the rotor (17) integrally with said rotor (17) and in the shape of a cylinder with an L shaped cross section, and is provided with: a contact portion (28) having an outer diameter enable press-fitting into the inner peripheral face of the cylindrical rotor (21); and a small-diameter section (29) positioned above said contact portion (28) and, having an outer diameter smaller than the inner diameter of the aforementioned cylindrical rotor (21), capable of being placed inside the cylindrical rotor (21) away from the inner peripheral face of the cylinder rotor (21).
公开/授权文献
- EP2589814B3 VACUUM PUMP 公开/授权日:2024-01-24
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