发明公开
- 专利标题: THIN FILM ULTRASOUND TRANSDUCER
- 专利标题(中): 薄膜超声转换器
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申请号: EP11744096.6申请日: 2011-07-12
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公开(公告)号: EP2598255A2公开(公告)日: 2013-06-05
- 发明人: KLEE, Mareike , MAUCZOK, Ruediger , BOOTS, Henri Marie Joseph , DE WILD, Nico Maris Adriaan , SREEDHARAN NAIR, Biju Kumar , WUNNICKE, Olaf , PASVEER, Willem Franke , VAN DE LAGEMAAT, Dirk , DIRKSEN, Peter
- 申请人: Koninklijke Philips Electronics N.V.
- 申请人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 专利权人: Koninklijke Philips Electronics N.V.
- 当前专利权人: Koninklijke Philips Electronics N.V.
- 当前专利权人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 代理机构: van Eeuwijk, Alexander Henricus Waltherus
- 优先权: EP11305741 20110614; EP10305849 20100730
- 国际公布: WO2012014111 20120202
- 主分类号: B06B1/06
- IPC分类号: B06B1/06
摘要:
The present invention relates to a transducer (11) comprising - a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17), - a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion, - first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18), -support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output pressure at the support side than at the opposite side. The invention also relates to a method of forming such a transducer, and an array comprising at least one transducer of the like.
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