发明公开
- 专利标题: PROCESS FOR PRODUCTION OF ALUMINUM-CONTAINING III NITRIDE SINGLE CRYSTAL
- 专利标题(中): 用于生产铝的III族氮化物单晶体
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申请号: EP11848944.2申请日: 2011-12-15
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公开(公告)号: EP2607527A1公开(公告)日: 2013-06-26
- 发明人: NAGASHIMA, Toru , HIRONAKA, Keiichiro
- 申请人: Tokuyama Corporation
- 申请人地址: 1-1, Mikage-cho Shunan-shi, Yamaguchi 745-8648 JP
- 专利权人: Tokuyama Corporation
- 当前专利权人: Tokuyama Corporation
- 当前专利权人地址: 1-1, Mikage-cho Shunan-shi, Yamaguchi 745-8648 JP
- 代理机构: Schlief, Thomas P.
- 优先权: JP2010278825 20101215
- 国际公布: WO2012081670 20120621
- 主分类号: C30B29/38
- IPC分类号: C30B29/38 ; C01F7/58 ; C01F7/62 ; C30B25/14 ; H01L21/205
摘要:
A process for producing an aluminum-containing III nitride single crystal, comprising: a reaction step of bringing a halogen gas and aluminum into contact with each other at a temperature of 300 to 700°C inclusive, thereby producing a mixed gas comprising a gas of an aluminum trihalide and a gas of an aluminum monohalide; a conversion step of setting the temperature of the mixed gas at a temperature that is equal to or higher than a temperature at which a solid of the aluminum trihalide is precipitated and that is lower by 50°C or more than a temperature at which the halogen gas and aluminum have been reacted with each other in the reaction step, thereby converting the aluminum monohalide in the mixed gas into a solid substance; a separation step of separating the solid substance from the gas, thereby removing the gas of the aluminum trihalide; and a crystal growth step of using the gas of the aluminum trihalide as an aluminum nitride single crystal raw material without lowering the temperature and while keeping the temperature at a temperature that is equal to or higher than the temperature employed in the conversion step.
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