发明公开
EP2617130A1 DISPOSITIF RESONANT, A DETECTION PIEZORESISTIVE ET A RESONATEUR RELIE DE FACON ELASTIQUE AU SUPPORT DU DISPOSITIF, ET PROCEDE DE FABRICATION DE CELUI-CI
审中-公开
与载体的检测器，柔性连谐振器和方法的元共振的压阻探测器用于制造这种探测器
- 专利标题： DISPOSITIF RESONANT, A DETECTION PIEZORESISTIVE ET A RESONATEUR RELIE DE FACON ELASTIQUE AU SUPPORT DU DISPOSITIF, ET PROCEDE DE FABRICATION DE CELUI-CI
- 专利标题（英）： Resonant piezoresistive detector having a resonator connected elastically to the ssupporting member of the detector, and process for manufacturing said detector
- 专利标题（中）： 与载体的检测器，柔性连谐振器和方法的元共振的压阻探测器用于制造这种探测器
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申请号： EP11754884.2申请日： 2011-09-13
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公开(公告)号： EP2617130A1公开(公告)日： 2013-07-24
- 发明人: HENTZ, Sébastien
- 申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址： 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- 专利权人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址： 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- 代理机构： Ilgart, Jean-Christophe
- 优先权： FR1057251 20100913
- 国际公布： WO2012034990 20120322
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H03H9/24
摘要：
The detector comprises: a supporting member (14); a suspended resonator (16), moving parallel to the plane of the supporting member; means (17) for actuating the resonator; and means (18) for detecting the displacement, comprising at least one piezoresistive gauge (20). According to the invention, the resonator is anchored to the supporting member via at least one elastic bending element (22), in order to push back the threshold at which a non-linear displacement regime appears. The detector can be manufactured by a surface technology and is applicable in particular to resonant mass sensors.
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