发明公开
EP2632815A2 LINER-BASED ASSEMBLY FOR REMOVING IMPURITIES 有权
安东尼MIT EINEM FUTTER ZUR ENTFERNUNG VON VERUNREINIGUNGEN

LINER-BASED ASSEMBLY FOR REMOVING IMPURITIES
摘要:
The present disclosure relates to a liner for storing a material, the liner including at least two layers, wherein a layer that is in contact with the material is an active layer. The active layer may be made active by incorporating a scavenger into the layer. At least one layer of the liner may comprise a polymer or a fluoropolymer. In some embodiments, the active layer may be configured for removing microbridging components in photoresists. In some embodiments, the active layer may be made active by coating the interior of the layer with an inert material, such as glass. In further embodiments, the liner may be positioned within a stainless steel canister. The present disclosure also relates to a liner-based assembly including a liner for storing a material, an overpack within which the liner is positioned, and a purifying packet positioned between the liner and the overpack.
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