发明公开
EP2632815A2 LINER-BASED ASSEMBLY FOR REMOVING IMPURITIES
有权
安东尼MIT EINEM FUTTER ZUR ENTFERNUNG VON VERUNREINIGUNGEN
- 专利标题: LINER-BASED ASSEMBLY FOR REMOVING IMPURITIES
- 专利标题(中): 安东尼MIT EINEM FUTTER ZUR ENTFERNUNG VON VERUNREINIGUNGEN
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申请号: EP11837063.4申请日: 2011-10-27
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公开(公告)号: EP2632815A2公开(公告)日: 2013-09-04
- 发明人: TOM, Glenn , DUBOIS, Lawrence, H.
- 申请人: Advanced Technology Materials, Inc.
- 申请人地址: 7 Commerce Drive Danbury, CT 06810 US
- 专利权人: Advanced Technology Materials, Inc.
- 当前专利权人: Advanced Technology Materials, Inc.
- 当前专利权人地址: 7 Commerce Drive Danbury, CT 06810 US
- 代理机构: Elsworth, Dominic Stephen
- 优先权: US407284P 20101027; US201161468626P 20110329
- 国际公布: WO2012058384 20120503
- 主分类号: B65D25/14
- IPC分类号: B65D25/14 ; B65D81/24 ; B65D85/84 ; B32B1/02
摘要:
The present disclosure relates to a liner for storing a material, the liner including at least two layers, wherein a layer that is in contact with the material is an active layer. The active layer may be made active by incorporating a scavenger into the layer. At least one layer of the liner may comprise a polymer or a fluoropolymer. In some embodiments, the active layer may be configured for removing microbridging components in photoresists. In some embodiments, the active layer may be made active by coating the interior of the layer with an inert material, such as glass. In further embodiments, the liner may be positioned within a stainless steel canister. The present disclosure also relates to a liner-based assembly including a liner for storing a material, an overpack within which the liner is positioned, and a purifying packet positioned between the liner and the overpack.
公开/授权文献
- EP2632815B1 LINER-BASED ASSEMBLY FOR REMOVING IMPURITIES 公开/授权日:2016-09-07
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