发明公开
EP2686133A1 METHOD FOR PRODUCING A REFLECTIVE OPTICAL COMPONENT FOR AN EUV PROJECTION EXPOSURE APPARATUS AND COMPONENT OF THIS TYPE
审中-公开
制造用于EUV投射曝光装置及零件这种类型的反射性光学部件
- 专利标题: METHOD FOR PRODUCING A REFLECTIVE OPTICAL COMPONENT FOR AN EUV PROJECTION EXPOSURE APPARATUS AND COMPONENT OF THIS TYPE
- 专利标题(中): 制造用于EUV投射曝光装置及零件这种类型的反射性光学部件
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申请号: EP12708143.8申请日: 2012-03-13
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公开(公告)号: EP2686133A1公开(公告)日: 2014-01-22
- 发明人: KIEREY, Holger , SIEKMANN, Heiko , BRESAN, Andre
- 申请人: Carl Zeiss Laser Optics GmbH , Carl Zeiss SMT GmbH
- 申请人地址: Carl-Zeiss-Strasse 22 73447 Oberkochen DE
- 专利权人: Carl Zeiss Laser Optics GmbH,Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss Laser Optics GmbH,Carl Zeiss SMT GmbH
- 当前专利权人地址: Carl-Zeiss-Strasse 22 73447 Oberkochen DE
- 代理机构: Witte, Weller & Partner
- 优先权: DE102011015141 20110316; US201161453269P 20110316
- 国际公布: WO2012123436 20120920
- 主分类号: B24B13/00
- IPC分类号: B24B13/00 ; G02B5/18
摘要:
A method for producing a reflective optical component (10) for an EUV projection exposure apparatus, said component having a substrate (12) having a base body (14), and a reflective layer (20) arranged on the substrate (12), wherein the substrate (12) has an optically operative microstructuring (16), comprises the following steps: working the microstructuring (16) into the substrate (12), polishing the substrate (12) after the micro-structuring (16) has been worked into the substrate (12), applying the reflective layer (20) to the substrate (12). A reflective optical component for an EUV projection exposure apparatus correspondingly has a polished surface between the microstructuring and the reflective layer.
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