Invention Publication
- Patent Title: SENSOR PROVIDED WITH METAL OXIDE FILM AND USE THEREOF
- Patent Title (中): 与金属氧化物和它们的使用SENSOR
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Application No.: EP11861099Application Date: 2011-03-18
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Publication No.: EP2688108A4Publication Date: 2014-11-19
- Inventor: OHMAE KEISUKE , MORI TETSUYA , HAYASE TETSUO , NAKAJIMA SEIJI , NISHIGUCHI MARIKO
- Applicant: OMRON TATEISI ELECTRONICS CO
- Assignee: OMRON TATEISI ELECTRONICS CO
- Current Assignee: OMRON TATEISI ELECTRONICS CO
- Priority: JP2011057277 2011-03-15
- Main IPC: H01L31/0264
- IPC: H01L31/0264 ; G01J1/02 ; G01L9/02 ; G01L11/02 ; G01N27/04 ; G01N27/12 ; H01L31/08
Abstract:
A sensor including a metal oxide film formed by wet processing and capable of detecting light, hydrogen gas, and air pressure is provided. A sensor according to the present invention is a sensor capable of detecting light, hydrogen gas, and air pressure, the sensor including a metal oxide film produced by a process including the steps of: (a) forming an organic film by using a primer composition containing (i) an addition polymerizable compound including three or more reactive groups, (ii) an addition polymerizable compound including an acid group, and (iii) an addition polymerizable compound including a hydrophilic functional group; (b) forming a metal (M1) salt from the acid group; (c) substituting the metal (M1) salt of the acid group with a metal (M2) salt by treating the organic film with a metal (M2) ion aqueous solution; (d) reducing the metal (M2) ion so that a metal film is formed on a surface of the organic film; and (e) oxidizing the metal film.
Information query
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