发明公开
EP2689450A1 FUNCTIONAL LIQUID EJECTION APPARATUS, FUNCTIONAL LIQUID EJECTION METHOD AND IMPRINTING SYSTEM 审中-公开
DEVICE一个函数喷出液体,方法弹出功能液和标记系统

FUNCTIONAL LIQUID EJECTION APPARATUS, FUNCTIONAL LIQUID EJECTION METHOD AND IMPRINTING SYSTEM
摘要:
A nozzle ejects a functional liquid having a viscosity of not less than 5 millipascal°second and not more than 20 millipascal°second, onto a substrate. The functional liquid inside a pressure chamber connected to the nozzle is pressurized. A drive voltage having a pull waveform element which causes the pressure chamber to expand from a steady state and a push waveform element which causes the expanded pressure chamber to contract, is generated with a relationship between a slope ?1 representing voltage change per unit time in the pull waveform element, the viscosity ? of the functional liquid, a resonance period Tc of the head, and a slope ?2 representing voltage change per unit time in the push waveform element satisfying (2/Tc) = ?1 = (?/10) and ?2 = ?1.
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