发明公开
EP2689450A1 FUNCTIONAL LIQUID EJECTION APPARATUS, FUNCTIONAL LIQUID EJECTION METHOD AND IMPRINTING SYSTEM
审中-公开
DEVICE一个函数喷出液体,方法弹出功能液和标记系统
- 专利标题: FUNCTIONAL LIQUID EJECTION APPARATUS, FUNCTIONAL LIQUID EJECTION METHOD AND IMPRINTING SYSTEM
- 专利标题(中): DEVICE一个函数喷出液体,方法弹出功能液和标记系统
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申请号: EP12763231.3申请日: 2012-03-23
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公开(公告)号: EP2689450A1公开(公告)日: 2014-01-29
- 发明人: KODAMA, Kenichi , KODAMA, Kunihiko , OMATSU, Tadashi
- 申请人: FUJIFILM Corporation
- 申请人地址: 26-30, Nishiazabu 2-chome Minato-ku Tokyo 106-8620 JP
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: 26-30, Nishiazabu 2-chome Minato-ku Tokyo 106-8620 JP
- 代理机构: Klunker . Schmitt-Nilson . Hirsch
- 优先权: JP2011068531 20110325
- 国际公布: WO2012133728 20121004
- 主分类号: H01L21/027
- IPC分类号: H01L21/027 ; B05C5/00 ; B05D1/26 ; B41J2/045 ; B41J2/055 ; B41J2/135
摘要:
A nozzle ejects a functional liquid having a viscosity of not less than 5 millipascal°second and not more than 20 millipascal°second, onto a substrate. The functional liquid inside a pressure chamber connected to the nozzle is pressurized. A drive voltage having a pull waveform element which causes the pressure chamber to expand from a steady state and a push waveform element which causes the expanded pressure chamber to contract, is generated with a relationship between a slope ?1 representing voltage change per unit time in the pull waveform element, the viscosity ? of the functional liquid, a resonance period Tc of the head, and a slope ?2 representing voltage change per unit time in the push waveform element satisfying (2/Tc) = ?1 = (?/10) and ?2 = ?1.
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