发明公开
- 专利标题： FACET MIRROR DEVICE
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申请号： EP11716864.1申请日： 2011-04-14
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公开(公告)号： EP2697688A1公开(公告)日： 2014-02-19
- 发明人: ZIEGLER, Gerhard-Wilhelm , BISCHOFF, Thomas
- 申请人： Carl Zeiss SMT GmbH
- 申请人地址： Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 专利权人： Carl Zeiss SMT GmbH
- 当前专利权人： Carl Zeiss SMT GmbH
- 当前专利权人地址： Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 代理机构： Cohausz & Florack
- 国际公布： WO2012139649 20121018
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G02B7/00
摘要：
There is provided a facet mirror device comprising a facet element and a support unit, the support unit supporting the facet element. The support unit comprises a first support element and a second support element, the second support element being connected to the facet element to support the facet element. The first support element is connected to the second support element to support the second support element, the first support element being connected to the second support element via at least one flexure unit, the flexure unit comprising at least one flexure.
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