发明公开
EP2702275A1 MICROPOMPE A DEBITMETRE ET SON PROCEDE DE REALISATION 有权
MIKROPUMPE MIT DURCHFLUSSMESSER UND HERSTELLUNGSVERFAHRENDAFÜR

MICROPOMPE A DEBITMETRE ET SON PROCEDE DE REALISATION
摘要:
The invention relates to a micropump having a deformable membrane, comprising: a first chamber (15), one wall of which comprises a first deformable membrane portion and means (72, 81, 83) for actuating said first membrane portion; a second chamber (11) provided with a second deformable membrane portion (11'); and a third chamber (13) provided with a third deformable membrane portion (13'), the second chamber and the third chamber being connected to one another by a first channel (12), at least one of said chambers being connected to the first chamber (15) by a second channel (12, 14), wherein both the second chamber (11) and the third chamber (13) comprise detection gauge means (R1-R4, R'1-R'4), respectively, but are not provided with actuation means.
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