发明公开
EP2711442A4 HEATING ASSEMBLY FOR VACUUM DEPOSITION, AND VACUUM DEPOSITION APPARATUS COMPRISING SAME
有权
贵州UR UR IT IT IT IT IT IT IT IT IT IT IT IT IT IT
- 专利标题: HEATING ASSEMBLY FOR VACUUM DEPOSITION, AND VACUUM DEPOSITION APPARATUS COMPRISING SAME
- 专利标题(中): 贵州UR UR IT IT IT IT IT IT IT IT IT IT IT IT IT IT
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申请号: EP13774597申请日: 2013-07-23
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公开(公告)号: EP2711442A4公开(公告)日: 2015-04-08
- 发明人: KIM HYUN JOONG , KIM HONG CHUL , JUN KYUNG II , KIM YOUNG RAE , HWANG YOUNG JUN
- 申请人: CEKO CO LTD
- 专利权人: CEKO CO LTD
- 当前专利权人: CEKO CO LTD
- 优先权: KR20120080536 2012-07-24
- 主分类号: C23C14/24
- IPC分类号: C23C14/24 ; C23C14/26 ; H05B3/02 ; H05B3/12
摘要:
The present invention is a vacuum evaporation heating assembly for heating a carrier, in which an evaporation material is filled, in a vacuum evaporation process, the vacuum evaporation heating assembly comprising: a carrier container in which the carrier is installed; and an electrode connector which extends in both directions of the carrier container to be connected to an electrode. At least one of the carrier container and the electrode connector is a plate-shaped member. The vacuum evaporation heating assembly can securely hold the carrier, in which the evaporation material is filled, and can vaporize the evaporation material in a specialized direction, thereby uniformly and efficiently evaporating the evaporation material with a small number of carriers.
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