发明公开
EP2726294A1 PIEZOELECTRIC INKJET DIE STACK 审中-公开
压电喷墨喷桩

PIEZOELECTRIC INKJET DIE STACK
摘要:
A piezoelectric inkjet die stack includes a circuit die stacked on a substrate die, a piezoelectric actuator die stacked on the circuit die, and a cap die stacked on the piezoelectric actuator die. Each die in succession from the circuit die to the cap die is narrower than the previous die.
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