- 专利标题: Piezoelectric material, piezoelectric element, and electronic apparatus
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申请号: EP13004974.5申请日: 2013-10-17
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公开(公告)号: EP2728634B1公开(公告)日: 2018-10-03
- 发明人: Koyama, Shinya , Shimizu, Yasushi , Kubota, Makoto , Uebayashi, Akira , Tanaka, Hidenori
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: 30-2, Shimomaruko 3-chome Ohta-ku Tokyo JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: 30-2, Shimomaruko 3-chome Ohta-ku Tokyo JP
- 代理机构: WESER & Kollegen
- 优先权: JP2012242894 20121102
- 主分类号: H01L41/187
- IPC分类号: H01L41/187 ; H01L41/083 ; C04B35/468 ; B08B7/02 ; B41J2/14 ; G02B7/10 ; H02N2/10 ; H02N2/16
摘要:
Provided is a lead-free piezoelectric material having satisfactory and stable piezoelectric constant and mechanical quality factor in a wide temperature range. The piezoelectric material includes a perovskite-type metal oxide (Ba 1-x Ca x ) a (Ti 1-y Zr y )O 3 , wherein 1.00 ‰¤ a ‰¤ 1.01, 0.125 ‰¤ x ‰¤ 0.300, 0.041 ‰¤ y ‰¤ 0.074, containing Mn and Mg. The Mn content is from 0.12 to 0.40 weight % of the perovskite-type metal oxide on a metal basis. The Mg content is less than 0.10 weight % of the perovskite-type metal oxide on a metal basis.
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