发明公开
- 专利标题: POLISHING PAD
- 专利标题(中): 抛光垫
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申请号: EP12831282.4申请日: 2012-09-14
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公开(公告)号: EP2757577A1公开(公告)日: 2014-07-23
- 发明人: HONDA, Tomoyuki , FUKUDA, Seiji , OKUDA, Ryoji
- 申请人: Toray Industries, Inc.
- 申请人地址: 1-1, Nihonbashi-Muromachi 2-chome Chuo-ku Tokyo, 103-8666 JP
- 专利权人: Toray Industries, Inc.
- 当前专利权人: Toray Industries, Inc.
- 当前专利权人地址: 1-1, Nihonbashi-Muromachi 2-chome Chuo-ku Tokyo, 103-8666 JP
- 代理机构: Webster, Jeremy Mark
- 优先权: JP2011202761 20110916
- 国际公布: WO2013039203 20130321
- 主分类号: H01L21/304
- IPC分类号: H01L21/304 ; B24B37/20 ; B24B37/26
摘要:
To suppress an increase in a polishing rate and deterioration of uniformity within a plane in a wafer due to shortage of the polishing rate in a central part of the wafer, a polishing pad at least includes a polishing layer, and a cushion layer, in which a plurality of holes is provided in the polishing layer, the holes passing through the polishing layer in a thickness direction, and a plurality of grooves is provided in a polishing surface of the polishing layer, a through hole ratio is from 0.13% or more to 2.1% or less, and angles made by the polishing surface and side surfaces of the groove, which continue to the polishing surface, is from 105 degrees or more to 150 degrees or less.
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