发明公开
EP2759620A1 HARD FILM, HARD FILM FORMED BODY, AND ROLLING BEARING 有权
HARTSCHICHT,AUS DER HARTSCHICHT GEFORMTERKÖRPERUNDWÄLZLAGER

  • 专利标题: HARD FILM, HARD FILM FORMED BODY, AND ROLLING BEARING
  • 专利标题(中): HARTSCHICHT,AUS DER HARTSCHICHT GEFORMTERKÖRPERUNDWÄLZLAGER
  • 申请号: EP12833570.0
    申请日: 2012-09-21
  • 公开(公告)号: EP2759620A1
    公开(公告)日: 2014-07-30
  • 发明人: TSUTSUI, HideyukiOOHIRA, KouyaNAKANISHI, Masaki
  • 申请人: NTN Corporation
  • 申请人地址: 3-17, Kyomachibori 1-chome Nishi-ku Osaka-shi, Osaka 550-0003 JP
  • 专利权人: NTN Corporation
  • 当前专利权人: NTN Corporation
  • 当前专利权人地址: 3-17, Kyomachibori 1-chome Nishi-ku Osaka-shi, Osaka 550-0003 JP
  • 代理机构: White, Duncan Rohan
  • 优先权: JP2011207936 20110922; JP2011207983 20110922; JP2011208005 20110922
  • 国际公布: WO2013042765 20130328
  • 主分类号: C23C14/06
  • IPC分类号: C23C14/06 F16C33/58
HARD FILM, HARD FILM FORMED BODY, AND ROLLING BEARING
摘要:
The present invention provides a hard film which has high wear resistance and excellent peeling resistance and can be prevented from peeling off a base material over a long period of time and a hard film formed body on which the hard film is formed. A hard film (8) has a structure composed of a first mixed layer (8a), consisting mainly of Cr and WC, which is formed directly on a raceway surface (2a) of an inner ring (2) (base material) of a rolling bearing, a second mixed layer (8b), consisting mainly of WC and DLC, which is formed on the first mixed layer (8a), and a surface layer (8c), consisting mainly of DLC, which is formed on the second mixed layer (8b). In the first mixed layer (8a), a content rate of the Cr becomes continuously or stepwise lower and that of the DLC becomes continuously or stepwise higher from a side of the base material toward a side of the second mixed layer (8b). In the second mixed layer (8b), a content rate of the WC becomes continuously or stepwise lower and that of the DLC becomes continuously or stepwise higher from a side of the first mixed layer (8a) toward a side of the surface layer (8c). A content of hydrogen in the second mixed layer (8b) is set to 10 to 45 atomic percent.
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