发明公开
EP2761236A2 APPARATUS AND METHOD FOR CONTROLLING A CRYOGENIC COOLING SYSTEM
有权
VORRICHTUNG UND VERFAHREN ZUM STEUERN EINESKRYOKÜHLSYSTEMS
- 专利标题: APPARATUS AND METHOD FOR CONTROLLING A CRYOGENIC COOLING SYSTEM
- 专利标题(中): VORRICHTUNG UND VERFAHREN ZUM STEUERN EINESKRYOKÜHLSYSTEMS
-
申请号: EP12780777.4申请日: 2012-09-27
-
公开(公告)号: EP2761236A2公开(公告)日: 2014-08-06
- 发明人: GARSIDE, John , BUEHLER, Matthias , TORTORELLA, Daniele , YUAN, Xing
- 申请人: Oxford Instruments Nanotechnology Tools Limited
- 申请人地址: Tubney Woods Abingdon, Oxon OX13 5QX GB
- 专利权人: Oxford Instruments Nanotechnology Tools Limited
- 当前专利权人: Oxford Instruments Nanotechnology Tools Limited
- 当前专利权人地址: Tubney Woods Abingdon, Oxon OX13 5QX GB
- 代理机构: Lord, Michael
- 优先权: GB201116639 20110927
- 国际公布: WO2013045929 20130404
- 主分类号: F25B9/14
- IPC分类号: F25B9/14
摘要:
Apparatus for controlling a cryogenic cooling system is described. A supply gas line and a return gas line are provided which are coupled to a compressor and to a mechanical refrigerator via a coupling element. The coupling element is in gaseous communication with the supply and return gas lines and supplies gas to the mechanical refrigerator. The pressure of the supplied gas is modulated by the coupling element in a cyclical manner. A pressure sensing apparatus monitors the pressure in at least one of the supply and return gas lines. A control system is used to modulate the frequency of the cyclical gas pressure supplied by the coupling element in accordance with the pressure monitored by the pressure sensing apparatus. An associated method of controlling such a system is also described.
公开/授权文献
信息查询