发明公开
EP2782880A1 VERFAHREN ZUR HERSTELLUNG VON SYNTHETISCHEM QUARZGLAS NACH DER SOOTMETHODE 有权
用于生产合成石英玻璃后SOOTMETHODE

VERFAHREN ZUR HERSTELLUNG VON SYNTHETISCHEM QUARZGLAS NACH DER SOOTMETHODE
摘要:
A known method for producing synthetic quartz glass comprises the following method steps: forming a stream from a SiO
2 starting material that contains octamethylcyclotetrasiloxane (D4) as a main component; a reference molecular mass being associated therewith; supplying the stream to a reaction zone in which the starting material is converted by pyrolysis or hydrolysis to SiO
2 while amorphous SiO
2 particles are formed; depositing the amorphous SiO
2 particles on a deposition surface to form a porous SiO
2 soot body; and vitrifying the soot body to form the quartz glass. In order to, proceeding therefrom, produce large-volume, cylindrical soot bodies having an outer diameter of more than 300 mm and an improved material homogeneity, the invention proposes that the liquid starting material contains additional components in the form of additional polyalkylsiloxanes, wherein light polyalkylsiloxanes having a relative molecular mass of less than the reference molecular mass and heavy polyalkylsiloxanes having a relative molecular mass of more than the reference molecular mass are contained with a weight proportion of at least 50 ppm and at least 30 ppm, respectively.
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