发明公开
EP2791961A1 ELECTRON-BOMBARDED CHARGE-COUPLED DEVICE AND INSPECTION SYSTEMS USING EBCCD DETECTORS
审中-公开
ELEKTRONENBOMBARDIERTE CHARGE加上EBCCD探测器装置和检查系统
- 专利标题： ELECTRON-BOMBARDED CHARGE-COUPLED DEVICE AND INSPECTION SYSTEMS USING EBCCD DETECTORS
- 专利标题（中）： ELEKTRONENBOMBARDIERTE CHARGE加上EBCCD探测器装置和检查系统
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申请号： EP12857499.3申请日： 2012-12-11
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公开(公告)号： EP2791961A1公开(公告)日： 2014-10-22
- 发明人: CHUANG, Yung-Ho Alex , LIU, Xuefeng , FIELDEN, John , BROWN, David L.
- 申请人： Kla-Tencor Corporation
- 申请人地址： One Technology Drive Milpitas, California 95035 US
- 专利权人： Kla-Tencor Corporation
- 当前专利权人： Kla-Tencor Corporation
- 当前专利权人地址： One Technology Drive Milpitas, California 95035 US
- 代理机构： Coyle, Philip Aidan
- 优先权： US201161569611P 20111212; US201213710315 20121210
- 国际公布： WO2013090261 20130620
- 主分类号： H01J31/50
- IPC分类号： H01J31/50
摘要：
A focusing EBCCD includes a control device positioned between a photocathode and a CCD. The control device has a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD. Each hole is surrounded by at least one first electrode, which is formed on a surface of the control device facing the photocathode. The control device may include a plurality of ridges between the holes. The control device may be separated from the photocathode by approximately half a shorter dimension of a CCD pixel or less. A plurality of first electrodes may be provided, wherein each first electrode surrounds a given hole and is separated from the given hole by a gap.
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