发明公开
EP2791965A1 PHOTOCURED PRODUCT AND METHOD FOR PRODUCING THE SAME
审中-公开
VICFAHHREN ZU SEINER HERSTELLUNG的LICHTGEHÄRTETESPRODUKT
- 专利标题： PHOTOCURED PRODUCT AND METHOD FOR PRODUCING THE SAME
- 专利标题（中）： VICFAHHREN ZU SEINER HERSTELLUNG的LICHTGEHÄRTETESPRODUKT
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申请号： EP13746741.1申请日： 2013-01-31
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公开(公告)号： EP2791965A1公开(公告)日： 2014-10-22
- 发明人: MURAYAMA, Yohei , ITO, Toshiki , MIHARA, Chieko , OKINAKA, Motoki
- 申请人： Canon Kabushiki Kaisha
- 申请人地址： 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 代理机构： WESER & Kollegen
- 优先权： JP2012026144 20120209
- 国际公布： WO2013118791 20130815
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; B29C39/10 ; B29C39/24 ; B29C59/02 ; C08K5/05 ; C08L33/00
摘要：
It is intended to provide a photocured product that is prepared using the photo-imprint method and has favorable pattern precision and improvement in pattern defects. The present invention provides a photocured product obtained by irradiating a coating film in contact with a mold with light, the photocured product containing a fluorine atom-containing surfactant, wherein of secondary ion signals obtained by the surface analysis of the photocured product based on time-of-flight secondary ion mass spectrometry, the intensity of a C2H5O+ ion signal is higher than that of a C3H7O+ ion signal.
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