发明公开
EP2800123A1 SAMPLE SUPPORTING MEMBER FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE AND METHOD FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE
审中-公开
样品载体ELEMENT FOR的扫描电子显微镜图像用于监控扫描电子显微镜图像观察AND METHOD
- 专利标题： SAMPLE SUPPORTING MEMBER FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE AND METHOD FOR OBSERVING SCANNING ELECTRON MICROSCOPIC IMAGE
- 专利标题（中）： 样品载体ELEMENT FOR的扫描电子显微镜图像用于监控扫描电子显微镜图像观察AND METHOD
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申请号： EP12863530.7申请日： 2012-12-26
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公开(公告)号： EP2800123A1公开(公告)日： 2014-11-05
- 发明人: OGURA, Toshihiko
- 申请人： National Institute of Advanced Industrial Science and Technology
- 申请人地址： 3-1 Kasumigaseki 1-chome Chiyoda-ku Tokyo 100-8921 JP
- 专利权人： National Institute of Advanced Industrial Science and Technology
- 当前专利权人： National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址： 3-1 Kasumigaseki 1-chome Chiyoda-ku Tokyo 100-8921 JP
- 代理机构： Gill, David Alan
- 优先权： JP2011286018 20111227
- 国际公布： WO2013099241 20130704
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; H01J37/09 ; H01J37/18 ; H01J37/28
摘要：
When injection of electrons into a sample supporting member causes a potential gradient between an insulative thin film (11) and a conductive thin film (12) at a site of electron beam injection, the potential barrier of the surface of the insulative thin film (11) becomes thin, and an electron emission phenomenon is caused by tunnel effects. Secondary electrons caused in the insulative thin film (11) tunnel to the conductive thin film (12) along the potential gradient. The secondary electrons, having tunneled, reach a sample (30) while diffusing in the conductive thin film (12). In the case where the sample (30) is a sample with a high electron transmittance, such as a biological sample, the secondary electrons also tunnel through the interior of the sample (30). The secondary electrons (42) are detected to acquire an SEM image in which the inner structure of the sample (30) is reflected.
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