发明公开
EP2808334A1 Method for forming a vanadium-containing layer on a substrate
审中-公开
Verfahren zur Bildung einer vanadiumhaltigen Schicht auf einem Substrat
- 专利标题： Method for forming a vanadium-containing layer on a substrate
- 专利标题（中）： Verfahren zur Bildung einer vanadiumhaltigen Schicht auf einem Substrat
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申请号： EP13305718.2申请日： 2013-05-31
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公开(公告)号： EP2808334A1公开(公告)日： 2014-12-03
- 发明人: Lachaud, Christophe , Correia - Anacleto, Antony , Lahootun, Vanina , Zauner, Andreas
- 申请人： L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
- 申请人地址： 75, Quai d'Orsay 75007 Paris FR
- 专利权人： L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
- 当前专利权人： L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
- 当前专利权人地址： 75, Quai d'Orsay 75007 Paris FR
- 代理机构： Grout de Beaufort, François-Xavier
- 主分类号： C07F9/00
- IPC分类号： C07F9/00 ; C23C16/40 ; C23C16/455
摘要：
Compounds of formula (I): (R i -C=C-R 2 )V(R 3 )(=NR 4 ),
- R 1 , R 2 are organic ligands independently selected in the group consisting of C1-C4 alkyls, C2-C4 alkene or amines,
- R 3 is an organic ligand independently selected in the group consisting of H, C1-C6 alkyl, aryl, C2-C6 alkenyl, alkylsilyl, alkylamides, alkylsilylamides, alkoxides, fluoroalkyls, cycloalkyls, halides,
- R 4 is an organic ligand independently selected in the group consisting of C1-C6 alkyl.
- R 1 , R 2 are organic ligands independently selected in the group consisting of C1-C4 alkyls, C2-C4 alkene or amines,
- R 3 is an organic ligand independently selected in the group consisting of H, C1-C6 alkyl, aryl, C2-C6 alkenyl, alkylsilyl, alkylamides, alkylsilylamides, alkoxides, fluoroalkyls, cycloalkyls, halides,
- R 4 is an organic ligand independently selected in the group consisting of C1-C6 alkyl.
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