发明公开
- 专利标题: PN-STRUCTURED GATE DEMODULATION PIXEL
- 专利标题(中): PN结构栅解调
-
申请号: EP13719601.0申请日: 2013-03-20
-
公开(公告)号: EP2828891A1公开(公告)日: 2015-01-28
- 发明人: BUETTGEN, Bernhard , LEHMANN, Michael , VAELLO, Bruno
- 申请人: MESA Imaging AG
- 申请人地址: Technoparkstrasse 1 8005 Zürich CH
- 专利权人: MESA Imaging AG
- 当前专利权人: MESA Imaging AG
- 当前专利权人地址: Technoparkstrasse 1 8005 Zürich CH
- 代理机构: Schley, Jan Malte
- 优先权: US201261613363P 20120320
- 国际公布: WO2013140227 20130926
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
A novel photo-sensitive element for electronic imaging purposes and, in this context, is particularly suited for time-of-flight 3D imaging sensor pixels. The element enables charge-domain photo-detection and processing based on a single gate architecture. Certain regions for n and p-doping implants of the gates are defined. This kind of single gate architecture enables low noise photon detection and high-speed charge transport methods at the same time. A strong benefit compared to known pixel structures is that no special processing steps are required such as overlapping gate structures or very high- ohmic poly-silicon deposition. In this sense, the element relaxes the processing methods so that this device may be integrated by the use of standard CMOS technology for example. Regarding time-of-flight pixel technology, a major challenge is the generation of lateral electric fields. The element allows the generation of fringing fields and large lateral electric fields.
公开/授权文献
- EP2828891B1 PN-STRUCTURED GATE DEMODULATION PIXEL 公开/授权日:2017-03-15
信息查询
IPC分类: