发明公开
EP2845921A3 Method of and apparatus for multiple channel flow ratio controller system
有权
方法和装置的系统用于在多个信道的控制的流量比
- 专利标题: Method of and apparatus for multiple channel flow ratio controller system
- 专利标题(中): 方法和装置的系统用于在多个信道的控制的流量比
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申请号: EP14194712.7申请日: 2012-09-28
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公开(公告)号: EP2845921A3公开(公告)日: 2015-04-08
- 发明人: Ding, Junhua
- 申请人: MKS Instruments, Inc.
- 申请人地址: 2 Tech Drive Andover, MA 01810 US
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: 2 Tech Drive Andover, MA 01810 US
- 代理机构: EIP
- 优先权: US201113252363 20111004
- 主分类号: C23C16/52
- IPC分类号: C23C16/52 ; C23C16/455 ; G05D11/13 ; H01L21/00
摘要:
A four channel gas delivery system. The system comprises an inlet channel; four outlet channels; four control valves, each valve being arranged so as to control the flow from the inlet channel through a corresponding one of the outlet channels; and a flow ratio control system. The flow ratio control system includes two dual antisymmetric optimal (DAO) control modules. The DAO control modules are configured and arranged so as to control the respective control valves so as to control the relative ratios of flow from the inlet channel through the four outlet channels. The flow ratio control system also includes a virtual DAO control module configured and arranged so as to control the ratio of flow between the two DAO control modules.
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