发明公开
EP2865005A1 THREE-DIMENSIONAL ELECTRONIC PACKAGES UTILIZING UNPATTERNED ADHESIVE LAYER
审中-公开
带粘合层的非结构化三维电子封装
- 专利标题: THREE-DIMENSIONAL ELECTRONIC PACKAGES UTILIZING UNPATTERNED ADHESIVE LAYER
- 专利标题(中): 带粘合层的非结构化三维电子封装
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申请号: EP13809106.1申请日: 2013-06-25
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公开(公告)号: EP2865005A1公开(公告)日: 2015-04-29
- 发明人: VICK, Eric, Paul
- 申请人: Research Triangle Institute, International
- 申请人地址: 3040 Cornwallis Road Research Triangle Park, NC 27709 US
- 专利权人: Research Triangle Institute, International
- 当前专利权人: Research Triangle Institute, International
- 当前专利权人地址: 3040 Cornwallis Road Research Triangle Park, NC 27709 US
- 代理机构: Mollekopf, Gerd Willi
- 优先权: US201261663893P 20120625
- 国际公布: WO2014004504 20140103
- 主分类号: H01L23/12
- IPC分类号: H01L23/12 ; H01L23/48
摘要:
An electronic package may be fabricated by forming a first layer of insulating material on a first substrate such that the first layer covers a contact pad; forming an opening through the first layer to expose the contact pad; forming an un-patterned second layer on the first layer, the second layer including an adhesive having a viscosity less than that of the first layer, wherein a region of the second layer obstructs the contact pad; removing the region to re-expose the contact pad; aligning a second substrate with the first substrate such that a via of the second substrate is aligned with the opening; bonding the first substrate and the second substrate together at the second layer; and forming an interconnect in contact with the contact pad by depositing a conductive material through the via and the opening.
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