发明公开
EP2873306A1 APPLICATEUR MICRO-ONDE COAXIAL POUR LA PRODUCTION DE PLASMA
审中-公开
KOAXIALER MIKROWELLENAPPLIKATOR ZUR PLASMAERZEUGUNG
- 专利标题: APPLICATEUR MICRO-ONDE COAXIAL POUR LA PRODUCTION DE PLASMA
- 专利标题(英): Coaxial microwave applicator for plasma production
- 专利标题(中): KOAXIALER MIKROWELLENAPPLIKATOR ZUR PLASMAERZEUGUNG
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申请号: EP13735269.6申请日: 2013-07-10
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公开(公告)号: EP2873306A1公开(公告)日: 2015-05-20
- 发明人: LACOSTE, Ana , PELLETIER, Jacques
- 申请人: Centre National de la Recherche Scientifique (CNRS) , Université Joseph Fourier-Grenoble 1
- 申请人地址: 3, rue Michel-Ange 75016 Paris FR
- 专利权人: Centre National de la Recherche Scientifique (CNRS),Université Joseph Fourier-Grenoble 1
- 当前专利权人: Centre National de la Recherche Scientifique (CNRS),Université Joseph Fourier-Grenoble 1
- 当前专利权人地址: 3, rue Michel-Ange 75016 Paris FR
- 代理机构: Regimbeau
- 优先权: FR1256677 20120711
- 国际公布: WO2014009410 20140116
- 主分类号: H05H1/46
- IPC分类号: H05H1/46
摘要:
The invention relates to a coaxial microwave applicator (1) for plasma production, comprising a coaxial tube formed by a central core (11) and an outer conductor (12) separated from the central core by an annular space (13) allowing propagation of microwaves. The applicator comprises: a cylindrical permanent magnet (21) disposed at the end of the central core (11); and at least one annular permanent magnet (22) disposed at the end of the outer conductor (12), all of the magnets (21, 22) disposed at the end of the coaxial tube (11, 12) having the same direction of magnetisation. The magnetisation of the magnets (21, 22) forms a magnetic field suitable for generating, in a zone (Z
RCE ) away from the end of the applicator, an electronic cyclotronic resonance coupling with the electric microwave field of the applicator (1). The external radius and the magnetisation of the annular magnet are selected such that the magnetic field lines (L) generated by the magnets pass through the coupling zone in a direction substantially parallel to the axis (X) of the applicator (1).
RCE ) away from the end of the applicator, an electronic cyclotronic resonance coupling with the electric microwave field of the applicator (1). The external radius and the magnetisation of the annular magnet are selected such that the magnetic field lines (L) generated by the magnets pass through the coupling zone in a direction substantially parallel to the axis (X) of the applicator (1).
公开/授权文献
- EP2873306B1 APPLICATEUR MICRO-ONDE COAXIAL POUR LA PRODUCTION DE PLASMA 公开/授权日:2019-05-08
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