发明公开
- 专利标题： MAGNETORHEOLOGICAL FLUID FOR ULTRASMOOTH POLISHING
- 专利标题（中）： 磁流体超光滑波兰
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申请号： EP13819596申请日： 2013-07-16
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公开(公告)号： EP2874784A4公开(公告)日： 2016-03-02
- 发明人: KORDONSKI WILLIAM , GORODKIN SERGEI , OSWALD ERIC
- 申请人： QED TECHNOLOGIES INT INC
- 专利权人： QED TECHNOLOGIES INT INC
- 当前专利权人： QED TECHNOLOGIES INT INC
- 优先权： US201213551786 2012-07-18
- 主分类号： B24B1/00
- IPC分类号： B24B1/00 ; C09G1/02 ; C09K3/14
摘要：
A magnetorheological fluid for use in magnetorheological ultrasmooth polishing of a substrate surface, comprising an aqueous carrier vehicle; a first amount of magnetic particles having a average diameter between about 1 micrometer and about 2 micrometers; and a second amount of abrasive particles having an average diameter between about
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