发明公开
- 专利标题： Method of producing a freestanding thin film of nano-crystalline carbon
- 专利标题（中）： 维尔法赫伦·赫斯特伦
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申请号： EP13195596.5申请日： 2013-12-04
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公开(公告)号： EP2881970A1公开(公告)日： 2015-06-10
- 发明人: Buijsse, Bart , Danev, Radostin , Sader, Kasim
- 申请人： FEI COMPANY , Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 专利权人： FEI COMPANY,Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 当前专利权人： FEI COMPANY,Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 代理机构： Bakker, Hendrik
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; C23C16/26 ; H01J37/26
摘要：
The invention relates to a method of producing a freestanding thin film of nano-crystalline graphite, the method comprising the steps of:
• providing a freestanding thin film of amorphous carbon,
• heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and
• allowing the freestanding thin film to cool down,
as a result of which a freestanding thin film of nano-crystalline graphite is formed.
Thin films of amorphous carbon are well known and are used in, for example, phase plates in a Transmission Electron Microscope, or as specimen carrier (figure 5A). A disadvantage is that exposure of the film to the electron beam may result in electronic changes in the film, resulting in so-called foot-prints (504). Using crystalline graphitic films overcomes this problem, but the size of the crystals, typically in the order of micrometers, interferes with high quality imaging. There is thus a need for nano-crystalline graphitic carbon film. The invention discloses how these films can be prepared, and discloses some uses for such films. As seen in figure 5B, no footprints occur.
• providing a freestanding thin film of amorphous carbon,
• heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and
• allowing the freestanding thin film to cool down,
as a result of which a freestanding thin film of nano-crystalline graphite is formed.
Thin films of amorphous carbon are well known and are used in, for example, phase plates in a Transmission Electron Microscope, or as specimen carrier (figure 5A). A disadvantage is that exposure of the film to the electron beam may result in electronic changes in the film, resulting in so-called foot-prints (504). Using crystalline graphitic films overcomes this problem, but the size of the crystals, typically in the order of micrometers, interferes with high quality imaging. There is thus a need for nano-crystalline graphitic carbon film. The invention discloses how these films can be prepared, and discloses some uses for such films. As seen in figure 5B, no footprints occur.
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