发明公开
- 专利标题: Vertical cavity surface emitting laser and atomic oscillator
- 专利标题(中): 激光雷达激光雷达和谐振器和原子振荡器
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申请号: EP14199276.8申请日: 2014-12-19
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公开(公告)号: EP2887469A2公开(公告)日: 2015-06-24
- 发明人: Kaneko, Tsuyoshi , Nishida, Tetsuo , Kurachi, Yuji
- 申请人: Seiko Epson Corporation
- 申请人地址: 4-1, Nishishinjuku 2-chome, Shinjuku-ku Tokyo 163-0811 JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: 4-1, Nishishinjuku 2-chome, Shinjuku-ku Tokyo 163-0811 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2013263459 20131220
- 主分类号: H01S5/183
- IPC分类号: H01S5/183 ; G04F5/14 ; H01S5/042 ; H01S5/32
摘要:
A vertical cavity surface emitting laser (100) includes: a substrate (10); a laminated body which is provided over the substrate; and a resin layer (70) which is provided on at least a side surface of the laminated body, wherein the laminated body at least includes a first mirror layer (20) provided over the substrate (10), an active layer (30) provided over the first mirror layer, and a second mirror layer (40) provided over the active layer, in a plan view, a length of the laminated body (2) in a first direction is greater than a length of the laminated body in a second direction orthogonal to the first direction, and in the plan view, a length of the resin layer in the first direction is greater than a length of the resin layer in the second direction. The non-circular shape of the mesa (2) and lateral oxidation of the mirror layers with high Al content (60,62) being part of the mesa (2) together with the non-circular shape of the resin layer results in a stress induced preferred polarisation of the VCSEL emission.
公开/授权文献
- EP2887469A3 Vertical cavity surface emitting laser and atomic oscillator 公开/授权日:2015-09-09
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