发明公开
- 专利标题: PROCÉDÉ DE FABRICATION D'UNE PLAQUETTE EN SILICIUM MONOLITHIQUE A MULTI-JONCTIONS VERTICALES
- 专利标题(英): Method for manufacturing a monolithic silicon wafer comprising multiple vertical junctions
- 专利标题(中): 用于生产整体式硅片多个垂直跃迁
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申请号: EP13774828.1申请日: 2013-09-03
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公开(公告)号: EP2893058A1公开(公告)日: 2015-07-15
- 发明人: GARANDET, Jean-Paul , CHAINTREUIL, Nicolas , FASIELLO, Annalaura , PILAT, Eric , VESCHETTI, Yannick
- 申请人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址: 25, rue Leblanc Bâtiment le Ponant D 75015 Paris FR
- 专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址: 25, rue Leblanc Bâtiment le Ponant D 75015 Paris FR
- 代理机构: Nony
- 优先权: FR1258224 20120904
- 国际公布: WO2014037878 20140313
- 主分类号: C30B15/04
- IPC分类号: C30B15/04 ; C30B29/06 ; H01J31/14 ; H01J31/18 ; H01L31/042
摘要:
The present invention relates to a method for manufacturing a monolithic silicon wafer (10) comprising multiple vertical junctions (2) having an alternation of n-doped areas and p-doped areas, including at least the steps of: (i) providing a liquid bath (100) including silicon, at least one n-type doping agent and at least one p-type doping agent; (ii) proceeding to directionally solidify the silicon in a direction (I), varying the convection-diffusion parameters thereof in order to alternate the growth of n-doped silicon layers (101) and p-doped silicon layers (102); and (iii) cutting a slice (104), parallel to the direction (I), of the multi-layer structure obtained at the end of the step (ii), such as to obtain said expected wafer (10).
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