发明公开
EP2898318A1 CAPTEUR DE FLUX THERMIQUE, CAPTEUR DE GAZ COMPORTANT AU MOINS UN TEL CAPTEUR ET JAUGE PIRANI COMPORTANT AU MOINS UN TEL CAPTEUR
审中-公开
热流量传感器，具有至少一个这样的传感器和皮拉尼压力计与至少一个这样的传感器气体传感器
- 专利标题： CAPTEUR DE FLUX THERMIQUE, CAPTEUR DE GAZ COMPORTANT AU MOINS UN TEL CAPTEUR ET JAUGE PIRANI COMPORTANT AU MOINS UN TEL CAPTEUR
- 专利标题（英）： Thermal flow sensor, gas sensor comprising at least one such sensor and pirani gauge comprising at least one such sensor
- 专利标题（中）： 热流量传感器，具有至少一个这样的传感器和皮拉尼压力计与至少一个这样的传感器气体传感器
-
申请号： EP13762520.8申请日： 2013-09-17
-
公开(公告)号： EP2898318A1公开(公告)日： 2015-07-29
- 发明人: RUELLAN, Jérémie , DURAFFOURG, Laurent , ARCAMONE, Julien , ANDREUCCI, Philippe , COLINET, Eric
- 申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址： 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- 专利权人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址： 25, rue Leblanc Bâtiment "Le Ponant D" 75015 Paris FR
- 代理机构： Brevalex
- 优先权： FR1258794 20120919
- 国际公布： WO2014044663 20140327
- 主分类号： G01N27/18
- IPC分类号： G01N27/18 ; G01N30/66
摘要：
A thermal flow sensor comprising at least one first suspended element (2) suspended relative to a support, said first suspended element (2) being made from an electrically conductive material, first polarisation means (6) of said suspended element (2) and first measuring means (8) for measuring the variation in electrical voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first polarisation means (6) being formed from an alternating current source of which the intensity heats the first suspended element (2) by Joule effect. Said sensor can be in the form of a plurality of suspended nanowires and can be used as a gas sensor based on the principle of the thermal conductivity measurement of said gas.
公开/授权文献
信息查询
