发明公开
- 专利标题： MEMS sensor with configuration to reduce non-linear motion
- 专利标题（中）： 微机电传感器
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申请号： EP15152031.9申请日： 2015-01-21
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公开(公告)号： EP2899503A1公开(公告)日： 2015-07-29
- 发明人: Anac, Ozan , Seeger, Joseph
- 申请人： InvenSense, Inc.
- 申请人地址： 1745 Technology Drive Suite 200 San Jose, CA 95110 US
- 专利权人： InvenSense, Inc.
- 当前专利权人： InvenSense, Inc.
- 当前专利权人地址： 1745 Technology Drive Suite 200 San Jose, CA 95110 US
- 代理机构： Smith, Jeremy Robert
- 优先权： US201461929838P 20140121; US201414495786 20140924
- 主分类号： G01C19/5733
- IPC分类号： G01C19/5733 ; G01C19/5747 ; G01C19/5762 ; G01P15/08 ; B81B3/00
摘要：
Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor, such as a gyroscope. Examples of gyroscope configurations (11A, 12A, 13A) includes at least one pair of counter-rotating arms (21A, 21B, 22A, 22B, 23A, 23B) linked to two traveling masses (31A, 31B, 32A, 32B, 33A, 33B). The modifications include any or any combination of providing a rigid element (21) between rotating structures of the spring mass configuration including the traveling masses (31A, 31B), tuning a spring system (22, 42A, 42B) between the rotating structures including the traveling masses (32A, 32B) and the rotating arms (12A, 12B) and coupling an electrical cancellation system (73A, 73B, 74A, 74B) to the rotating structures including the traveling masses (33A, 33B) and the rotating arms (23A, 23B). In so doing, unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.
公开/授权文献
- EP2899503B1 MEMS sensor with configuration to reduce non-linear motion 公开/授权日：2020-11-25
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