发明公开
EP2908192A2 Atomic source with heater on thermal isolation DIE
审中-公开
Atomare Quelle mit Heizer auf einerWärmeisolierungsmatrize
- 专利标题： Atomic source with heater on thermal isolation DIE
- 专利标题（中）： Atomare Quelle mit Heizer auf einerWärmeisolierungsmatrize
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申请号： EP15152956.7申请日： 2015-01-28
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公开(公告)号： EP2908192A2公开(公告)日： 2015-08-19
- 发明人: Compton, Robert
- 申请人： Honeywell International Inc.
- 申请人地址： 101 Columbia Road P.O. Box 2245 Morristown, NJ 07962-2245 US
- 专利权人： Honeywell International Inc.
- 当前专利权人： Honeywell International Inc.
- 当前专利权人地址： 101 Columbia Road P.O. Box 2245 Morristown, NJ 07962-2245 US
- 代理机构： Houghton, Mark Phillip
- 优先权： US201461939090P 20140212; US201414249012 20140409
- 主分类号： G04F5/14
- IPC分类号： G04F5/14
摘要：
In one embodiment, a chip scale atomic sensor is provided. The chip scale atomic sensor includes a body that defines at least one sensing chamber. The body includes a thermal isolation die mounted to the body. The thermal isolation die is disposed in a location that communicates with the at least one sensing chamber. The thermal isolation die includes a substrate defining a frame portion and an isolated portion and a plurality of tethers mechanically coupling the isolated portion of the substrate to the frame portion. The thermal isolation die also includes an atomic source mounted on the isolated portion of the substrate, and a heating element mounted on the isolated portion and configured to heat the atomic source.
公开/授权文献
- EP2908192A3 Atomic source with heater on thermal isolation DIE 公开/授权日：2016-11-16
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