发明公开
- 专利标题： PROCÉDÉ DE RÉALISATION D'UN ÉLÉMENT FLEXIBLE MULTISTABLE
- 专利标题（英）： Method for the production of a multistable flexible element
- 专利标题（中）： 用于生产MULTI稳定弹性元件
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申请号： EP13789254.3申请日： 2013-11-06
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公开(公告)号： EP2917788A2公开(公告)日： 2015-09-16
- 发明人: STRANCZL, Marc , HESSLER, Thierry
- 申请人： Nivarox-FAR S.A.
- 申请人地址： Avenue du Collège 10 2400 Le Locle CH
- 专利权人： Nivarox-FAR S.A.
- 当前专利权人： Nivarox-FAR S.A.
- 当前专利权人地址： Avenue du Collège 10 2400 Le Locle CH
- 代理机构： Giraud, Eric
- 优先权： EP12192026 20121109
- 国际公布： WO2014072317 20140515
- 主分类号： G04B17/26
- IPC分类号： G04B17/26 ; G04B15/14
摘要：
The invention relates to a method for the production of a multistable flexible element (5), consisting in: etching a silicon component (S) in which a beam (P) connects two ends (E1; E2) of a rigid mass (MU) having a cross-section more than ten times greater than that of the beam (P); growing SiO
2 , at 1100°C, for a period adjusted to obtain: at the beam (P), a first ratio (RA) greater than 1 between the cross-section of a first peripheral layer (CP1) of SiO
2 and that of a first silicon core (A1); and, at the mass (MU), a second ratio (RB) between the cross-section of a second peripheral layer (CP2) of SiO
2 and that of a second silicon core (A2), which is less than one hundredth of the first ratio (RA); cooling to ambient temperature in order to buckle the beam (P) during the cooling of the mass (MU), said mass contracting more than the beam (P).
2 , at 1100°C, for a period adjusted to obtain: at the beam (P), a first ratio (RA) greater than 1 between the cross-section of a first peripheral layer (CP1) of SiO
2 and that of a first silicon core (A1); and, at the mass (MU), a second ratio (RB) between the cross-section of a second peripheral layer (CP2) of SiO
2 and that of a second silicon core (A2), which is less than one hundredth of the first ratio (RA); cooling to ambient temperature in order to buckle the beam (P) during the cooling of the mass (MU), said mass contracting more than the beam (P).
公开/授权文献
- EP2917788B1 PROCÉDÉ DE RÉALISATION D'UN ÉLÉMENT FLEXIBLE MULTISTABLE 公开/授权日：2017-04-26
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